UNIT OF MAGNETRON DIFFUSER CATHODE Russian patent published in 2017 - IPC C23C14/35 

FIELD: metallurgy.

SUBSTANCE: unit contains a target 1 fixed in the walls of housing 4, a first electrostatic screen 7 installed on the outside of the walls of housing 4 and the base 5. From the side of inner surface 3 of target 1, a plate 10 is arranged, in shape identical to the shape of target 1 with thickness of 1 to 4 mm, and tightly pressed to its inner surface 3. Central magnet 11 is mounted in the center of base 5, and external magnets 12 are located on the base periphery 5. On the base 5, a heat transfer element 13 with an internal groove 15, in which a central magnet 11 is installed, is placed, and with external grooves 16, in which a cooling conduit 17 is installed. Cooling pipe 17 is made in form of rectangular frame with chamfered corners of tubes of rectangular cross section and contains pipes for supply and removal of coolant 18. Wherein, in the heat transfer element 13, holes 19 are formed into which pipes for supply and removal of coolant 18 are inserted. The cross section of the cooling pipeline 17 is selected from the condition of providing effective cooling with turbulent flow regime of coolant characterized by Reynolds number of at least 8000.

EFFECT: increasing cooling efficiency and reliability of unit of magnetron diffuser cathode.

3 cl, 4 dwg