METHOD OF DEPOSITING PLATINUM COATING ON SUBSTRATE Russian patent published in 2015 - IPC C23C16/46 C23C16/18 

FIELD: chemistry.

SUBSTANCE: invention relates to a method of depositing a palladium coating on a substrate and can be used when making water-permeable palladium-containing membranes. A substrate is placed in a reactor which is evacuated to 1·10¹ Pa. The substrate is heated to the required temperature and precursor vapour is delivered to the reactor zone where the substrate is located. The substrate is heated to 150-300°C, vapour of a palladium (II) bis-hexafluoroacetyl acetonate precursor and a hydrogen reactant gas are discretely and successively fed into the reaction zone with temperature of 55-70°C, and the reaction mixture is held for a given time, followed by evacuation of the reactor. Further, the method includes releasing nitrogen into the reactor, holding for a given time and evacuating the reactor to initial pressure, wherein the process is repeated in pulsed mode cycle after cycle until a given thickness of the coating is obtained. In special cases of the invention, one process cycle is not less than 30 s, the volume of the hydrogen reactant gas and nitrogen is given depending on the amount of the precursor fed into the reactor using a computer program. The substrate material used is porous steel, porous steel coated with a metal oxide, silicon or copper.

EFFECT: obtaining palladium coatings in a wide thickness range (10 nm - 10 mcm) with improved quality of the coating and obtaining dense palladium layers.

4 cl, 3 ex