FIELD: medical equipment.
SUBSTANCE: invention relates to medical equipment, namely to a method for applying iron oxide coating on acupuncture needles by atomic layer deposition. Acupuncture needles are placed in the reaction chamber, a vacuum is created inside the chamber at a pressure of 1-5 mbar, a cycle is carried out, including heating the acupuncture needles to a temperature of 220-280°C, discretely sequential supply of vapors of the precursor of bis-η5-cyclopentadienyl iron II ( ferrocene) with a temperature of 80-100°C for 1-3 s with a holding time of 1-3 s and an oxygen reagent gas at a pressure of 1-3 bar for 5-7 s with a holding time of 1-3 s. After the mentioned precursor has been vented and after oxygen has been vented, the reactor is purged with nitrogen and pumped out to the initial pressure.
The specified cycle is carried out until the formation of a given coating thickness of 4-32 nm with at least 600 cycles.
EFFECT: invention provides uniform coating, increased sorption properties and adhesive strength of the resulting acupuncture needles.
1 cl, 4 dwg, 4 tbl, 4 ex
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Authors
Dates
2022-06-14—Published
2022-02-09—Filed