FIELD: process engineering.
SUBSTANCE: invention relates to physical chemistry and can be used for production of photon crystals with preset physical properties. Substrate with pre-applied silica microspheres is placed into reactor. Reactor chamber is evacuated to 10-4 torr. Substrate is heated to 192-230°C to feed precursor vapors at 45-56°C into reaction zone. Vapors are held for at least 1.5 s. Air is fed into reaction chamber to pressure of 10-2 torr. Reaction mix is held for, at least 2 seconds and reactor is evacuated to initial vacuum.
EFFECT: simplified process, expanded process performances due to production of preset size nanoparticles.
3 cl, 3 dwg
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