METHOD OF REACTIVE MAGNETRON APPLICATION OF NANO-SIZED OXIDE LAYER ON SUBSTRATE Russian patent published in 2015 - IPC C23C14/35 B82B3/00 

Abstract RU 2556433 C1

FIELD: chemistry.

SUBSTANCE: preliminary devolatilisation and purification of a rolled film is realised in a mixture of an inert gas and nitrogen with its movement relative to plasma of a magnetron discharge in a vacuum chamber. The application of oxide is carried out in the chamber with, at least, one pair of magnets in the bipolar pack-pulse mode or their electrical power supply with the stabilised voltage and current, limit for the source of electricity.

EFFECT: creation of multilayer polymer films, high-barrier relative to the penetration of gases and vapours.

3 cl, 1 dwg, 1 ex

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RU 2 556 433 C1

Authors

Korolev Sergej Petrovich

Panchenko Viktor Petrovich

Sadogurskij Maksim Naumovich

Sejdman Lev Aleksandrovich

Soroka Arkadij Matveevich

Dates

2015-07-10Published

2013-12-26Filed