GAS-DISCHARGE EXCIMER LASER (VERSIONS) Russian patent published in 2015 - IPC H01S3/977 

FIELD: physics, optics.

SUBSTANCE: invention relates to laser engineering. The laser includes a gas-filled housing which is fitted with a ceramic discharge chamber with an extended high-voltage flange, a high-voltage electrode and a grounded electrode, both placed extended and placed in the discharge chamber, and at least one preionisation unit. Each preionisation unit comprises a system for generating creeping discharge, which includes an extended dielectric plate having an arched shape in the cross-section. In another version of the invention, the high-voltage electrode is placed on the inner side of the high-voltage flange and is partially transparent. The preionisation unit is placed on the back side of the partially transparent high-voltage electrode. The extended walls of the ceramic discharge chamber are preferably inclined towards the high-voltage electrode, and capacitors are inclined towards the high-voltage electrode.

EFFECT: high generation energy and power of the laser.

24 cl, 6 dwg