FIELD: measuring equipment.
SUBSTANCE: invention relates to methods for manufacturing field emission cathodes using carbon nanotubes and can be used to manufacture elements and devices of vacuum micro- and nanoelectronics. Method includes setting an electrically conductive buffer layer onto the surface-supported, setting the catalyst layer, the formation of a vertically oriented massive of carbon nanotubes by plasma-chemical deposition from the gas phase with the ratio of the length of carbon nanotubes to their diameter in the range from 25 to 75, thermal treatment of massive of carbon nanotubes in a vacuum and treatment of massive of carbon nanotubes by hydrogen-based plasma.
EFFECT: technical result is an increase in the maximum current density of field emission cathodes on the basis of vertically oriented CNT massives in combination with an increase in the stability of the emission current and the lifetime of the cathode.
16 cl, 5 dwg
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