METHOD OF MAKING PRESSURE SENSOR HAVING CARBON NANOTUBES Russian patent published in 2014 - IPC G01L7/00 B82B1/00 

FIELD: physics.

SUBSTANCE: method of making a pressure sensor involves depositing a first dielectric layer on the surface of a substrate, forming an electrical interconnection, depositing a second dielectric layer, forming a region for growing an array of carbon nanotubes in form of a depression on the substrate using lithography, forming a buffer layer, forming a functional layer over the buffer layer, said functional layer containing a catalyst for growing carbon nanotubes, removing the resist mask deposited during lithography, conducting synthesis of carbon nanotubes with plasma stimulation of the process of growing carbon nanotubes. A top sealing layer at least over the array of carbon nanotubes can be formed thereafter.

EFFECT: high reliability of operation of the sensitive element of the pressure sensor, high sensitivity of the pressure sensor, stable operation of the sensor irrespective of changes in parameters of the working medium.

18 cl, 4 dwg