SENSING ELEMENT OF OPTICAL SENSOR Russian patent published in 2016 - IPC H01L27/30 B82B1/00 

FIELD: monitoring and measuring equipment.

SUBSTANCE: invention relates to optical radiation sensors. Sensitive element of optical sensor comprises substrate 1, array of carbon nanotubes 2, electroconductive layer 3, dielectric layer 4, as well as upper optically transparent layer 5. In substrate 1 there is a recess 6 where array of carbon nanotubes 2 is formed at layer of aluminium or aluminium oxide 7. On surface of substrate 1 except zone of recess 6 a dielectric layer 4 is formed followed with electroconductive layer 3. Electrically conductive layer 3 forms an electrical contact with lateral surface of array of carbon nanotubes 2. Array of carbon nanotubes 2 electrically contacts with substrate 1 through layer of aluminum oxide or aluminum 7. Upper optically transparent layer 5 sealing array of carbon nanotubes can be arranged either on entire surface or at area of carbon nanotube array 2 only.

EFFECT: technical result consists in improvement of reliability of optical sensor's sensitive element without compromising sensitivity of optical sensor by eliminating effect of external environment factors.

8 cl, 2 dwg