MULTI-ELEMENT MIS VARICAP Russian patent published in 2015 - IPC H01L29/92 

FIELD: electricity.

SUBSTANCE: invention can be used for development of varicaps intended for frequency and phase control of variable signal in wireless devices of HF and SHF ranges. MIS varicap comprises semiconductor of electron conduction type, dielectric, control electrode and drain unit of minority carriers with p-n area having depth equal to thickness of semiconductor. The drain source is made multi-element as a set of alternating areas of electron and hole conduction, at that one of the drain unit areas is coupled to the control electrode and linear size of the drain unit elements is equal to linear size of semiconductor.

EFFECT: decreased self-capacitance of the drain unit in inverse proportion to number of areas with hole conduction in elements of the drain unit thus leading to increased capacitance overlap.

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