DEVICE FOR COAT APPLICATION IN VACUUM Russian patent published in 2016 - IPC C23C14/24 C23C14/50 

FIELD: process engineering.

SUBSTANCE: claimed device comprises vacuum chamber, hot deposition system for material deposition of the substrate both sides, disc wheel supporting the actuators with substrate holders and vacuum evacuation system. Two master plates are fixed at the vacuum chamber cover to turn the substrates through 180 degrees per one turn of the wheel. One master plate is shaped to the ring while the other one is composed of the open ring. Said actuators are rigidly secured at the wheel periphery in symmetry and at equal distance from each other in circumference. Each said actuator comprises the shaft, one end of the latter supports the substrate holders and opposite end carries the spider with four bearings. The latter run over the master plate paths to change over from one master plate to another one. Said bearings are fitted on the spider in pairs through 90 degrees and shifted in actuator axis through distance equal to spacing between master plates.

EFFECT: higher reliability, fabrication of integral films on both sides of the substrate in one process cycle.

4 cl, 4 dwg