RESONANT PRESSURE SENSOR Russian patent published in 2014 - IPC G01L11/00 

FIELD: measurement equipment.

SUBSTANCE: invention relates to measurement equipment and may be used to measure pressure of liquid and gases. A resonant pressure sensor comprises a measurement membrane with an exciting electrode and a resonant cavity. To the edges of the membrane at two sides there is a resonant element fixed in the form of a beam with a rectangular cross section, in the body of which there are strain gauges. The size of the beam cross section in orthogonal direction to the plane of oscillations is permanent, and in direction of oscillations it rises according to the linear law, achieving the maximum value in the middle of the beam. The ratio of the maximum cross section to the minimum one in the specified direction is in the range from 1 to 6.

EFFECT: reduced non-linearity of a conversion characteristic of a resonant pressure sensor.

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