HUMIDITY SENSOR Russian patent published in 2018 - IPC G01N27/12 

FIELD: measurement technology.

SUBSTANCE: use: to measure the moisture content of the gas medium. Summary of the invention consists in that the humidity sensor comprises a substrate of a dielectric material with film electrodes deposited thereon and the dielectric film in the gap between them, the electrodes are spaced apart on the substrate relative to each other to form a gap of 0.1–2.0 mm and are made by thermal deposition in a vacuum on a substrate made of ceramic, a layer of aluminum films for each of the electrodes, a film of a subsequent second metal layer, selected from the group Al, Ti, Sn for one of the electrodes and a subsequent second layer of Ag for the other electrode, and also applying to the surface of the second layer of each of the electrodes and in the interval between the electrodes on the surface of the ceramic substrate subjected to its application together with all layers and a ceramic substrate annealing in air at a temperature of 400 °C for 10 min of a linear-chain carbon film obtained by precipitation in graphite vacuum, evaporated by a pulsed arc discharge with the help of a plasma created by an arc discharge outside the discharge gap region in the form of compensated current-free foreheads of a carbon plasma of density 5⋅10¹²-1⋅10¹³ cm^-3, duration 200–600 mcs, repetition frequency 1–5 Hz, when the carbon plasma is stimulated with an inert gas in the form of an ion flux with an energy of 150–2,000 eV directed perpendicular to the flow of the carbon plasma.

EFFECT: providing possibility of increasing the sensitivity, and the range of moisture determination.

1 cl, 5 dwg