METHOD OF OBTAINING INSTRUMENT GRAPHENE STRUCTURES Russian patent published in 2015 - IPC H01L21/04 

Abstract RU 2538040 C2

FIELD: chemistry.

SUBSTANCE: grapheme layer is grown on substrate-donor and then covered with film, auxiliary for grapheme layer transfer. After that, tightening frame, preventing crumpling during transfer, is created on film, auxiliary for grapheme layer transfer, or continuous strengthening film, securing mechanical integrity and preventing crumpling during transfer, is applied. Graphene layer, covered with film, auxiliary for grapheme layer transfer, is separated from substrate-donor and its transfer on substrate is carried out. After transfer of grapheme layer, covered with film, auxiliary of grapheme layer transfer, on substrate, it is pressed to substrate.

EFFECT: prevention of impairment of structures and electrophysical characteristics of grapheme layers.

17 cl, 2 dwg

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Authors

Soots Regina Al'Fredovna

Antonova Irina Veniaminovna

Golod Sergej Vjacheslavovich

Seleznev Vladimir Aleksandrovich

Komonov Aleksandr Ivanovich

Prints Viktor Jakovlevich

Dates

2015-01-10Published

2013-04-30Filed