METHOD FOR APPLICATION OF ZIRCONIUM OXIDE COATING ON SURFACE OF ARTICLE MADE OF NICKEL ALLOY Russian patent published in 2016 - IPC C23C14/35 

FIELD: machine building.

SUBSTANCE: invention relates to material science, particularly to spraying of heat shielding coating, and can be used in aircraft engineering and other fields of industry in production of parts of turbine engines and plants which require formation on working surfaces of coatings, having sufficiently high value of adhesion and cohesion. Method of applying a coating of zirconium oxide on surface of articles made of nickel alloy involves formation on surface of an article made of nickel alloy of a composite gradient layer with a metal oxide structure and sputtering a zirconium oxide film to achieve required thickness. Formation of said gradient layer with a metal oxide structure is carried out by deposition of a gradient transition layer containing a metal phase based on nickel alloy, which corresponds to composition of said article surface, and a dielectric phase containing zirconium oxides of different stoichiometry, wherein a magnetron system with two magnetrons is used. First magnetron is used to sputter a first target made of nickel alloy, and a second magnetron is used to sputter a second target made of zirconium with additives of stabilising elements. Gradient transition layer is formed by sputtering said targets. First, sputtering of targets is carried out in an argon atmosphere with provision of excess intensity atomic stream formed from said first target, over intensity atomic flow from said second target with formation of solid metal layer, then, spraying in presence of oxygen with formation in sputtered zirconium oxide film at non-oxidised nickel alloy. During sputtering, partial oxygen pressure is gradually increased to 1.5 * 10^-3 Pa, and power of first magnetron, sputtering target from nickel alloy, is reduced up to its complete disconnection.

EFFECT: smooth transition from metallic material to oxide without interphase boundaries of macroscopic size.

1 cl