METHOD OF APPLYING THERMAL-PROTECTIVE COMPOSITE COATING CONTAINING ZIRCONIUM OXIDE ON METAL SURFACE OF ARTICLE Russian patent published in 2017 - IPC C23C4/10 C23C4/12 

FIELD: aviation.

SUBSTANCE: invention relates to spraying of heat shielding coating and can be used in aircraft engineering and other fields of industry in production of parts of turbine engines and plants. Method of applying thermal-protective composite coating, containing zirconium oxide, on metal surface of an article involves formation on metal surface of a composite metal-oxide structure with combined sputtering of metals and sputtering zirconium oxide film to achieve required thickness. In obtained coating, containing zirconium oxide stabilised by yttrium, a gradient transition layer is formed, containing two phases in form of metal phase with composition corresponding to composition of protected surface, and dielectric phase containing zirconium oxide, ratio of phases in transition layer is varied with increase of share of oxide phase as film thickness increases. To obtain said gradient transition layer, a magnetron with two magnetrons is used. Using first magnetron, first target made from nickel alloy is sputtered, composition of which corresponds to composition of metal article and second magnetron is used to sputter second target made of zirconium with yttrium additives. Initial sputtering of targets is performed in argon medium, intensity of atomic flux formed from first target made from said nickel alloy, exceeds intensity of atomic flux from second zirconium target. After formation of primary solid layer of nickel alloy, oxygen is fed into working chamber with provision of reactive sputtering with formation in sputtered zirconium oxide film in non-oxidised nickel alloy, wherein during sputtering oxygen partial pressure is smoothly increased to 1.5⋅10^-3 Pa, and power of first magnetron, sputtering first target made from said nickel alloy, is reduced up to its complete disconnection.

EFFECT: providing mechanical strength of coating, high heat resistance, as well as high adhesion and cohesion of coating on working surfaces of parts.

1 cl