METHOD OF PROCESSING WORKING SURFACES OF PARTS OF GAS TURBINE PLANTS Russian patent published in 2016 - IPC C23C4/10 C23C4/12 C23C14/16 C23C14/35 

FIELD: technological processes.

SUBSTANCE: invention relates to material science, particularly to methods of sputtering of heat shielding coating, and can be used in aircraft building and other fields of industry in production of parts of turbine engines and plants. Procedure for application of heat shielding coating on working surface comprises applying plasma sputtering onto a prepared surface of parts from nickel-based alloy coating out of zirconium oxide stabilized by yttrium, wherein coating is created in it gradient transition layer by means of two magnetrons, wherein by means of first magnetron is sputtered a first target from nickel-based alloy, which corresponds to composition of alloy parts , and by second magnetron is sputtered a second target made of zirconium with additives of stabilising element yttrium, wherein sputtering of first target is carried out in an argon atmosphere so that intensity of atomic stream formed from first target exceeds intensity of atomic stream formed from second target, wherein after formation of solid metal layer oxygen is fed into working chamber of sputtered coating zirconium oxide process of sputtering of partial oxygen pressure is smoothly increased to 1.5*10^-3 Pa, and power of first magnetron is decreased until its complete disconnection, sputtering is continued until formation of zirconium oxide stabilised by yttrium, required thickness to produce nanostructured coating containing metal phase with composition corresponding to composition of alloy protected surface part, and phase of zirconium oxide stabilised by yttrium, with increasing of part surface fraction phase of zirconium oxide.

EFFECT: invention is aimed at improvement of adhesion and cohesion of coating.

1 cl