METHOD OF FORMING ON SURFACE OF ARTICLES FROM NICKEL ALLOY COMPOSITE COATING Russian patent published in 2017 - IPC C23C14/35 

FIELD: aviation.

SUBSTANCE: invention relates to sputtering of heat shielding coatings and can be used in aircraft engineering and other fields of industry in production of parts of turbine engines and plants. Method of forming on surface of articles made from nickel alloy a composite coating containing zirconium oxide, comprises sputtering a zirconium oxide film to achieve required thickness, wherein prior to sputtering said film on article surface a primary continuous layer of nickel alloy is formed, which corresponds to composition of said article with zirconium and with addition of a stabilising element and a gradient transition nanocomposite layer with a metal-oxide structure. Formation of said primary layer and gradient transition nanocomposite layer is carried out using a magnetron system with two combined sputtering magnetrons. Using first magnetron a target made of said nickel alloy is sputtered, and using a second magnetron a second target made of zirconium with addition of stabilising element is sputtered. Said primary layer is formed by combined sputtering of said targets in an argon atmosphere, wherein intensity of atomic flux formed from said first target is greater than intensity atomic flux from said second target. Method then includes formation of a gradient transition nanocomposite layer by sputtering said targets in presence of oxygen to form said gradient layer of zirconium oxide in non-oxidised nickel alloy. Ratio of phases in gradient transition layer is varied with increase of share of oxide phase with increase in thickness of said layer, oxygen partial pressure during sputtering is smoothly increased to 1.5 * 10^-3 Pa, and power of first magnetron, sputtering first target from said nickel alloy, is reduced up to its complete disconnection, a smooth transition from layer of nickel alloy to film of zirconium oxide without interphase boundaries of macroscopic size is obtained.

EFFECT: providing mechanical strength of coating, high heat resistance, as well as high adhesion and cohesion of coating on working surfaces of articles.

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