HEAT-PROTECTIVE NANOCOMPOSITE COATING AND FORMATION METHOD THEREOF Russian patent published in 2017 - IPC C23C14/35 B82Y15/00 

FIELD: engines and pumps; heat exchange.

SUBSTANCE: heat-protective nanocomposite coating containing zirconium oxide, deposited on surface of articles from nickel alloy using magnetron system comprises primary continuous layer, gradient transition layer and film of zirconium oxide. Primary continuous layer consists of a nickel alloy, which corresponds to composition of said articles with zirconium and with additives of stabilising element. Gradient transition layer consists of two phases in form of a dielectric phase of zirconium oxide and metal phase of nickel alloy, which corresponds to composition of said article surface, and zirconium with addition of stabilising element, wherein fraction of oxide phase in transition layer increases with increase of its thickness. Method of forming said thermal-protective nanocomposite coating on surface of articles from nickel alloy is characterised by that it includes forming on surface of article a primary solid layer of nickel alloy, which corresponds to composition of said article with zirconium and with addition of stabilising element, gradient transition layer and sputtering a film of zirconium oxide until it reaches required coating thickness. Formation of said primary layer and gradient transition layer is carried out using magnetron system with two magnetrons. Using first magnetron a target made of said nickel alloy is sputtered, and using a second magnetron a second target made of zirconium with addition of stabilising element is sputtered. Said primary layer is formed by sputtering said targets in an argon atmosphere at intensity of atomic flux formed from said first target greater than intensity atomic flux from said second target. Then, formation of said gradient transition layer by sputtering said targets in presence of oxygen with formation in transition layer of zirconium oxide and non-nickel alloy. Oxygen partial pressure during sputtering is gradually increased to 1.5*10^-3 Pa, and power of first magnetron, sputtering first target from said nickel alloy, is reduced up to its complete disconnection. In a particular embodiment, stabilising element used is a yttrium.

EFFECT: higher mechanical strength of coating, high heat resistance, as well as high adhesion and cohesion.

3 cl