METHOD OF FORMING ON WORKING SURFACE OF PART MADE FROM NICKEL ALLOY THERMAL-PROTECTIVE NANOCOMPOSITE COATING Russian patent published in 2017 - IPC C23C14/35 

FIELD: aviation.

SUBSTANCE: invention relates to sputtering of heat shielding coatings and can be used in aircraft engineering and other fields of industry in production of parts of turbine engines and plants. Method of forming on working surface of parts made from nickel alloy a thermal-protective nanocomposite coating containing zirconium oxide, comprises pre-machining surface of part made from nickel alloy, forming a primary solid layer of nickel alloy, which corresponds to composition of said part, with zirconium and with addition of stabilising a element, subsequent formation of a gradient transition nanocomposite layer with a metal-oxide structure and sputtering a zirconium oxide film to achieve required thickness. Formation of said primary layer and gradient transition nanocomposite layer is carried out using a magnetron system with combined sputtering using two magnetrons. Using first magnetron a target made of said nickel alloy is sputtered, and using a second magnetron a second target made of zirconium with addition of stabilising element is sputtered. Said primary layer is formed by sputtering said targets in an argon atmosphere. Intensity of atomic flux formed from said first target is greater than intensity of atomic flux from said second target. Method then includes forming a nanocomposite gradient transition layer by sputtering said targets in presence of oxygen to make said gradient layer of zirconium oxide and non-oxidised nickel alloy, wherein ratio of phases in gradient transition layer is varied with increase of share of oxide phase as thickness of said layer increases, oxygen partial pressure during sputtering is smoothly increased to 1.5⋅10^-3 Pa, and power of first magnetron, sputtering first target from said nickel alloy, is reduced up to its complete disconnection. Smooth transition is obtained from layer of nickel alloy to zirconium oxide film without interphase boundaries of macroscopic size.

EFFECT: providing mechanical strength of coating, high heat resistance, as well as high adhesion and cohesion of coating on working surfaces of parts.

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