HIGH-STRENGTH MATERIAL COATED ARTICLE MADE FROM METAL, SOLID ALLOY, CERMET OR CERAMIC AND METHOD OF MAKING SAID ARTICLES Russian patent published in 2016 - IPC C23C16/36 C23C16/44 

FIELD: technological processes.

SUBSTANCE: invention relates to high-strength coating applied on article made from metal, solid alloy, cermet or ceramics by thermal chemical vapour deposition without additional plasma excitation and a method of applying said coating. Said high-strength coating contains at least one nanocomposite layer TiSiCN, containing nano-crystalline phase of TiC_xN_1-x with size of crystallites from 5 to 150 nm, where 0.1≤x≤0.99, and second phase of amorphous SiC_xN_y. Method of applying said high-strength coating is characterised by that at least one composite layer from TiSiCN is deposited on an article from a gas mixture containing at least one titanium halide, at least one silicon-containing precursor, hydrogen and reaction compounds containing carbon and nitrogen atoms, and/or nitrogen compounds, and/or hydrocarbons and/or inert gases by thermal chemical vapour deposition at a temperature of 700-1,100°C and pressure from 10 Pa to 101.3 kPa without additional plasma excitation. Molar ratio between halides of titanium and silicon-containing precursors is selected to ensure in a gaseous mixture ratio between silicon and titanium atoms content greater than 1.

EFFECT: providing coating with high hardness, resistance to oxidation and temperature resistance, as well as high adhesion strength, and can be used for protection of various tools from hard alloys and ceramics.

13 cl, 2 dwg, 3 ex