METHOD OF SYNTHESIS OF TiN-Cu COMPOSITE COATINGS AND DEVICE FOR ITS IMPLEMENTATION Russian patent published in 2018 - IPC C23C14/24 B82B3/00 C23C14/06 B23B27/14 

FIELD: technological processes.

SUBSTANCE: invention relates to method and apparatus for synthesizing superhard composite TiN-Cu coating and can be used to harden working edges of cutting tool. Method includes synthesis of TiN at arc discharge current of 60–90 A in Cu vapor dosed in synthesis zone from vaporization zone of Cu, sputtering with Cu magnetron discharge at current of 0.6–1 A. Copper vapor is discharged through slit hole in wall separating zones steam formation of Cu and synthesis of TiN. Device comprises vacuum arc evaporator, planar magnetron, vacuum chamber of plasma chemical reactor, substrate holder and reaction gas supply system, nitrogen. Chamber of plasma-chemical reactor is divided by diaphragm wall into two compartments: TiN synthesis compartment and Cu vapor formation compartment. In diaphragm wall there is slotted hole coaxial with symmetry axis of magnetron. Planar magnetron and vacuum-arc evaporator are installed: first is vertical, second is horizontal.

EFFECT: increase in process efficiency due to optimization of technological parameters of synthesis of TiN-Cu composite coating with thermal stability, mechanical, tribological and thermophysical properties and controlled formation of nanostructured grain structure.

2 cl, 2 dwg, 1 ex