SYSTEM AND METHOD OF DETERMINING THICKNESS OF ANALYSED LAYER IN MULTILAYER STRUCTURE Russian patent published in 2016 - IPC G01B7/06 

FIELD: measuring equipment.

SUBSTANCE: invention relates to measurement equipment. System comprises a first electrode, having a first surface of contact with a sample, which can be held in contact with first surface of multilayer structure, a second electrode, having a second surface of contact with a sample, which can be held in contact with second surface of multilayer structure. Second surface is located on opposite side of first surface. System also includes a pressure control device to press first electrode to multilayer structure with preset test pressure, pressure at which electrical impedance of sample reaches reference impedance corresponding to sample.

EFFECT: device also includes a measuring device, electrically connected first electrode and second electrode and configured to measure electrical impedance between first electrode and second electrode.

8 cl, 4 dwg