SPECTROMETER FOR SOFT X-RAY AND VUV RANGES Russian patent published in 2016 - IPC G01J3/18 G01T1/36 H01J31/50 

FIELD: instrument making.

SUBSTANCE: invention relates to analytical instrument making and concerns a spectrometer for vacuum ultraviolet (VUV) and soft X-ray (SXr) ranges. Spectrometer includes an inlet slit, a concave diffraction grating of grazing incidence, an image recorder with strobed microchannel plate-based (MCP) detector, a luminescent screen, an outer electrode and a pulse generator. MCP detector comprises a microchannel plate, on the inlet side of which a spectrum of reflected from the concave diffraction grating radiation is formed. Outer electrode is placed opposite to the inlet side of the microchannel plate. Luminescent screen is installed opposite to the outlet side of the microchannel plate. Pulse generator generates strobing electric voltage pulses between the MCP inlet side electrode and the luminescent screen electrode, as well as voltage pulses between the outer electrode and the MCP inlet side electrode.

EFFECT: technical result is the improvement of sensitivity, reduced noise level, wider dynamic measurement range and the increase of time and spectral resolution.

14 cl, 4 dwg