COMPACT WIDE RANGE VUV SPECTROMETER Russian patent published in 2018 - IPC G01J3/18 

FIELD: instrument engineering.

SUBSTANCE: invention relates to analytical instrumentation and concerns a compact wide-range vacuum ultraviolet (VUV) spectrometer of a soft X-ray (SX) range. Spectrometer consists of a body with a slit, remote radiation source, diffraction grating and a detector. Radiation source illuminates the diffraction grating at a sliding angle θ. Diffraction grating with a constant period d has planar reflecting active faces, which lies in the plane of the grating and does not reflect the light of the depression between the active faces. Detector provides registration of a VUV spectrum in plus first and in minus first diffraction order, a long-wavelength line λ₊₁ of the spectrum working region of plus the first order is many times smaller than the long-wavelength line λ_-1 of the spectrum working region of minus the first order: λ₊₁<<λ_-1, and the spectral resolution (λ/δλ)₊₁ in the spectrum working region of plus the first order is many times greater than the spectral resolution (λ/δλ)_-1 in the spectrum working region of minus the first order: (λ/δλ)₊₁>>(λ/δλ)_-1.

EFFECT: technical result of the invention is the detection of the spectrum in a wide spectral range (3–200 nm), with a moderate spectral resolution (λ/δλ~15–30) and with a much higher spectral resolution (λ/δλ~200) in a narrow soft x-ray or extreme ultraviolet range, it is possible to measure the absolute radiation yield in these spectral regions and to reduce the dimensions of the spectrometer.

21 cl, 6 dwg