LASER METHOD FOR PRODUCTION OF FUNCTIONAL COATINGS Russian patent published in 2016 - IPC C23C4/12 B82B3/00 

FIELD: machine building.

SUBSTANCE: invention relates to production of functional coatings (versions) and can be used in machine building, chemical and electronic industry, in nuclear power engineering. Method involves depositing particles of dust flow on the treated surface of products of laser ablation, which is performed in a sealed chamber. Chamber is filled with inert gas or chemically active gas or gas mixture thereof. Ablation of dust particles is performed till complete or partial evaporation at the intensity of laser radiation value of 10⁴-10⁵ W/cm² and below the threshold of optical discharge ignition while maintaining the working pressure of from 0.1 torr to atmospheric pressure in the chamber. Vapor deposits on the treated surface located in close proximity to the focal zone. According to the second version, dust particles are precipitated in plasma of glow discharge, ignited between the treated surface and an auxiliary electrode-cathode. According to the third version, along with deposition of vapor phase products of incomplete ablation of dust particles are transported to the treated surface by means of electric field, created between the treated surface and auxiliary electrode.

EFFECT: use of the invention enables to obtain a wide range of functional coatings using relatively low-power solid-state, fibre and CO₂-lasers in a quasi-continuous or continuous mode.

3 cl, 1 dwg