METHOD TO PRODUCE DIAMOND-LIKE COATINGS BY COMBINED LASER ACTION Russian patent published in 2014 - IPC C30B23/02 C30B30/00 C30B29/04 C23C14/28 B82B3/00 B82Y40/00 

FIELD: metallurgy.

SUBSTANCE: diamond-like coatings are produced in vacuum by spraying of target material with an impulse laser. The target material made of graphite of high degree of purity (more than 99.9%) is exposed to combined laser radiation: first short-wave (less than 300 nm) pulse radiation, the source of which is a KrF-laser with wavelength of 248 nm and specific energy of 5·10⁷ W/cm², as a result of which ablation is carried out, and gas-plasma phase of target material is generated. Subsequent exposure of a gas-plasma cloud during cloud flight from a target to a substrate is carried out by long-wave (more than 1 mcm) laser radiation. The source of long-wave laser radiation is a gas CO₂-laser or a solid-state fibrous laser radiator.

EFFECT: increased diamond phase in a produced coating and increased energy spectrum of plasma at stage of its flight.

3 cl, 1 dwg