FIELD: optics.
SUBSTANCE: method of making diffractive optical elements includes laser processing of thin-film layers of metal deposited on a substrate made from a transparent material. Phase relief of diffraction optical element is formed by oxidation of thin-film metal layer in the oxygen medium with scanning laser radiation to form transparent metal oxide.
EFFECT: technical result consists in producing diffractive optical elements with higher efficiency and accuracy of micro-relief of arbitrary topology.
4 cl, 4 dwg
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