FIELD: optics.
SUBSTANCE: process of manufacture of diffraction optical elements lies in layer-by-layer application of photoresist coats, in subjection of each coat to operations of fogging through proper mask, in development and hardening. Formation of stepped relief is started from second step, after formation of all steps additional masking layer of photoresist resistant to anisotropic pickling is applied. Then it is fogged through proper mask. Thereafter anisotropic pickling is carried out with formation of first step and vertical wall of relief on boundaries of break of phase function.
EFFECT: manufacture of diffraction optical elements with enhanced precision of microrelief on boundaries of break of function of any configuration.
9 dwg
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