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2 556 313

(13)

(51)

IPC

G03F7/00(2006-01-01)

G02B27/42(2006-01-01)

(21) (22)

Application

2013127328/28, 2013-06-14

(24)

Start date

2013-06-14

(22)

Actual filing date

2013-06-14

(45)

Published

2015-07-10

(72)

Inventor

Volkov Aleksej Vasil'EvichKazanskij Nikolaj L'VovichMoiseev Oleg Jur'EvichPoletaev Sergej Dmitrievich

(73)

Holder

Rossijskaja Akademija Nauk Federal'Noe Gosudarstvennoe Bjudzhetnoe Uchrezhdenie Nauki Institut Sistem Obrabotki Izobrazhenij Rossijskoj Akademii Nauk Ran)

FABRICATION OF AMPLITUDE DIFFRACTION OPTICAL ELEMENTS AND MASKS FOR PRODUCTION OF PHASE STRUCTURES Russian patent published in 2015 - IPC G03F7/00 G02B27/42

Abstract RU 2556313 C2

FIELD: physics, optics.

SUBSTANCE: this process relates to optical instrument making, particularly, to production of diffraction optics and masks for making of phase structures. It includes application of molybdenum 35-45nm-deep film on dielectric substrate surface and subjecting it to focused laser radiation. Laser radiation density makes (0.8-1.2)·10⁷ W/cm² to allows a complete removal (ablation) of metal film in the area of effects.

EFFECT: decreased number of process jobs, shorter process cycle.

2 dwg

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RU 2 556 313 C2

Authors

Volkov Aleksej Vasil'Evich

Kazanskij Nikolaj L'Vovich

Moiseev Oleg Jur'Evich

Poletaev Sergej Dmitrievich

Dates

2015-07-10—Published

2013-06-14—Filed