FIELD: optics.
SUBSTANCE: method relates to optical instrument-making and can be used to create diffractive optical elements of the visible and ultraviolet range - Fresnel lenses, correctors, and so forth. Method of making phase diffraction gratings, microstructures and contact masks includes magnetron deposition of a molybdenum film on the surface of a dielectric substrate, formation of topological pattern of optical element with subsequent exposure in muffle furnace at temperature 500 °C for 0.5–3.5 minutes.
EFFECT: method allows to reduce the technological cycle duration.
1 cl
| Title | Year | Author | Number |
|---|---|---|---|
| METHOD FOR PRODUCING PHASE DIFFRACTION MICROSTRUCTURES | 2015 |
|
RU2620932C2 |
| FABRICATION OF AMPLITUDE DIFFRACTION OPTICAL ELEMENTS AND MASKS FOR PRODUCTION OF PHASE STRUCTURES | 2013 |
|
RU2556313C2 |
| METHOD OF SUBLIMATION AND LASER PROFILING OR DRILLING OF TRANSLUCENT SUBSTRATES | 2014 |
|
RU2556177C1 |
| X-RAY MASK | 2022 |
|
RU2785012C1 |
| METHOD AND DEVICE FOR FABRICATION OF MASK FOR LASER UNIT FOR PRODUCTION OF MICROSTRUCTURES | 2010 |
|
RU2580901C2 |
| METHOD FOR FORMING A PERIODIC PATTERN ON THE SURFACE OF AMORPHOUS THIN FILMS OF PHASE-VARIABLE CHALCOGENIDE MATERIALS | 2022 |
|
RU2786788C1 |
| MULTI-FOCAL INTRAOCULAR LENS AND METHOD OF MANUFACTURE OF THAT LENS | 2005 |
|
RU2303961C1 |
| FORMING OF MICROSTRUCTURE ON SURFACE BY PLASTIC STRAIN | 2013 |
|
RU2546720C1 |
| PROCESS OF MANUFACTURE OF DIFFRACTION OPTICAL ELEMENTS ON DIAMOND AND DIAMOND-LIKE SUBSTRATES | 2001 |
|
RU2197006C2 |
| METHOD FOR MAKING DIFFRACTIVE OPTICAL ELEMENTS | 2014 |
|
RU2601391C2 |
