FIELD: measuring equipment, namely instrument making, may be used in mobile objects' inertial systems, in automatic pilots of aero and ship models and transportation facilities' security systems.
SUBSTANCE: micromechanical transducer has a monolithic body with sensitive inertial element and outlets. The sensitive inertial element is fulfilled in the form of stratified microstructure which has at least one emitting layer arranged with clearance relatively to inertial angle of that element. The stratified microstructure has arranged successively a quartz substrate, lower conductor layer with emitting layer, laying layer and upper conductor layer which may have an inertial unit of pendulum type. Mode of micromechanical transducer manufacturing includes ultrasonic cleaning of quartz substrate, putting of sensitive inertial element's layers on substrate and forming of microstructure layers with the help of photolithography and chemical pickling.
EFFECT: increasing micromechanical transducer structure's reliability; simplifying the process of its manufacturing and sufficient increasing of output percent of valid devices.
13 cl, 16 dwg
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