FIELD: physics.
SUBSTANCE: composite resonator of excimer laser has discharge chamber, output module, spectral line radiation narrowing module and module for amplification of radiation. Laser discharge chamber consists of working gas for generating radiation under effect of excitation source. Laser discharge chamber, output module and spectral line radiation narrowing module make narrowing resonator of spectral line, configured to narrow spectral line of radiation generated by working gas. Discharge chamber, output module and radiation amplification module make amplifying resonator configured to amplify power of radiation with spectral line, necked with narrowing resonator of spectral line radiation.
EFFECT: technical result is aimed at narrowing of spectral line with simultaneous increase of output power of radiator.
9 cl, 3 dwg
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