EXCIMER LASER SYSTEM WITH RING RESONATOR STRUCTURE Russian patent published in 2020 - IPC H01S3/83 H01S3/97 

FIELD: physics.

SUBSTANCE: according to the present invention, an excimer laser system is proposed. Chamber of master oscillator can generate laser pulses with narrowed line width and low energy by means of module of line width narrowing as seed light. Seed light is refracted by the wave front generating unit in the master oscillator and then falls into the power amplifier chamber through the beam splitting system. Beam splitting system, first highly reflective mirror, second highly reflective mirror and a third highly reflective mirror can form a quadrangular circular optical path, wherein power amplifier chamber can have first pair of Brewster windows and second pair of Brewster windows, wherein first pair of Brewster windows is located in first optical path of circular optical path together with discharge electrode of power amplifier chamber, and the second pair of Brewster windows is located in the second optical path of the circular optical path, parallel to the first optical path of amplification.

EFFECT: present invention enables to reduce the length of the annular resonator of the excimer laser system with the ring resonator structure, increasing the amplification ratio and achieving amplification in the mode of deeper saturation compared to the conventional design, thereby improving the output radiation characteristic of the excimer laser system.

3 cl, 3 dwg