METHOD FOR PRODUCING AMORPHOUS FILMS OF CHALCOGENIDE GLASS-BASED SEMICONDUCTORS WITH PHASE MEMORY EFFECT Russian patent published in 2017 - IPC C23C14/35 H01L21/203 

Abstract RU 2609764 C1

FIELD: chemistry.

SUBSTANCE: used bismuth modified chalcogenide semiconducting material of Ge2Sb2Te5. The said material is mechanically activated. Carried out non-equilibrium high-frequency ion-plasma deposition of material in the gas mix of argon and hydrogen at a ratio of 90:10. Material deposited on a dielectric layer in medium vacuum at a pressure between 0.5 to 1.0 Pa and radio-frequency voltage range of 400 to 470 V.

EFFECT: increase of information transfer speed and reduction of power intake.

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RU 2 609 764 C1

Authors

Timoshenkov Sergej Petrovich

Sherchenkov Aleksej Anatolevich

Korobova Natalya Egorovna

Lazarenko Petr Ivanovich

Kalugin Viktor Vladimirovich

Babich Aleksej Valterovich

Dates

2017-02-02Published

2015-10-26Filed