COLLAPSIBLE INVERTED-MAGNETRON VACUUM-GAUGE CONVERTER WITH ADDITIONAL CARBON FIELD-EFFECT EMITTER, PROTECTED FROM ION BOMBARDMENT Russian patent published in 2017 - IPC G01L21/30 

FIELD: chemistry.

SUBSTANCE: invention can be used for creation of ionization vacuum gauges. Essence of invention lies in that, inverted-magnetron vacuum-gauge transducer comprises concentrically arranged plug-in anode and hollow cylindrical ion collector and field-effect emitter, structure is collapsible, field-effect emitter is made in form of a nanocarbon film, deposited on silicon substrate, and is fixed in a special holder, located on same axis with anode, and a protective potential is applied on surface of field-effect emitter at pressures above 10^-6 Pa.

EFFECT: technical result is possibility of expansion of measurement range of transducer in region of ultra-low pressures, increasing measurement accuracy, facilitating ignition of discharge, increasing value of ion current.

1 cl, 3 dwg