FIELD: information technology.
SUBSTANCE: method for generating an image of a sample, comprises capturing a first two-dimensional substrate image of a surface region of sample with a first image capturing modality; capturing a second two-dimensional substrate image of surface region with a second image capturing modality which is different from first image capturing modality; spatially aligning first two-dimensional substrate image based on second two- dimensional substrate image; generating a first corrected two-dimensional substrate image based on locations of at least one material in second two-dimensional substrate image. Second image capturing modality provides greater accuracy with respect to locations of at least one material at the surface region than first image capturing modality.
EFFECT: technical result is obtaining images with higher accuracy and consistency.
29 cl, 38 dwg
