METHOD OF FORMING AN IMAGE OF AN OBJECT SURFACE Russian patent published in 2019 - IPC G01N23/225 

FIELD: data processing; physics.

SUBSTANCE: use to form in digital form an image of microstructure of phase composition on surface of real physical object, which is analyzed using scanning microscopy. Summary of invention consists in the fact that emission of electrons from the surface of the analyzed object in a scanning electron microscope, their collection and recording to construct a two-dimensional image of the object in digital form, repeated scanning of the surface of the analyzed object with a probe of a measuring head of a scanning probe microscope for constructing a three-dimensional image of the object in digital form, wherein the repeated scanning is performed with a probe of an atomic force microscope, wherein three-dimensional image of object in digital form is converted into two-dimensional image in digital form using data obtained during construction of two-dimensional image in digital form using collection and recording of back-reflected electrons in scanning electron microscope in composite contrast mode.

EFFECT: possibility of forming an image of the microstructure of the surface of an object with higher accuracy by improving a contrast of the obtained image.

1 cl, 3 dwg