FIELD: physics.
SUBSTANCE: invention relates to a negatively charged ion source. The disclosed ion source comprises a plasma chamber, a microwave source, a device for conversion into negatively charged ions, a magnetic filter and a beam forming device. The plasma chamber comprises a gas to be ionised. The microwave source transmits microwaves into the plasma chamber for ionisation of the gas to produce isotopes, including high-temperature neutral atoms. The device for conversion into a source of negatively charged ions converts high-temperature neutral atoms into negatively charged ions. The magnetic filter reduces electron temperature between the plasma chamber and the device for conversion into a source of negatively charged ions. The beam forming device extracts negatively charged ions.
EFFECT: high reliability of the ion source and longer service life thereof.
25 cl, 26 dwg
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