FIELD: machine building.
SUBSTANCE: device consists of reservoirs for storage and supply of probe gas arranged downstream gas flow, of element of low conductivity at molecular mode of probe gas flow, of vacuum pump, of pressure gauge and commutation accessories connected to reservoir of supply. According to the invention the device additionally consists of an overflow reservoir connected to the reservoir of probe gas supply, while the element of low conductivity installed at output of probe gas from the device is made in form of a glass capillary. Also, flow of probe gas from the device is determined by ratio disclosed in formula of the invention including indices related to reference flow of probe gas, to capillary conductivity, to volume of the supply reservoir, to time from the moment of probe gas flow inlet through the capillary into a process installation, and to initial pressure of probe gas at inlet into the capillary.
EFFECT: upgraded accuracy of generation of reference flow of probe gas and expanded range of generated calibrating flows with decreasing values.
2 cl, 1 dwg
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Authors
Dates
2011-08-10—Published
2010-07-09—Filed