ACCELERATION SENSOR AND MANUFACTURING METHOD OF ACCELERATION SENSOR Russian patent published in 2017 - IPC G01P15/08 

FIELD: physics, control and alarm system.

SUBSTANCE: invention relates to the acceleration sensor and the manufacturing method of such acceleration sensor. The acceleration sensor contains a substrate with the substrate surface and the test mass adapted to be moved against the substrate in the direction of the (x) deviation, substantially parallel to the substrate surface of the first direction (x). The test mass contains a comb electrode adapted to be moved together with the test mass and containing several teeth, which extend in the first direction (x). The acceleration sensor contains, in addition, an opposite electrode, which is fixedly connected to the substrate and containg a fixed comb electrode, and the fixed comb electrode contains several teeth, which extend in the direction opposite to the first direction (x). The teeth of the movable comb electrode are engaged with the teeth of the fixed comb electrode. The acceleration sensor contains, in addition, a shielding electrode, which is fixedly connected to the substrate and adapted to increase the test mass damping during the movement of the proof mass deviation.

EFFECT: invention and manufacturing of the acceleration sensor that increases the damping of the test mass movement deviation.

9 cl, 3 dwg