FIELD: measuring equipment.
SUBSTANCE: invention relates to measuring equipment and can be used in micromechanical linear acceleration sensors. The center plate assembly located between the stationary outer plates is integrally formed. The outer frame and the inner part are formed, connected through elastic elements. An additional contour frame of variable thickness and width is attached to the outer side of the fixed outer plate. Areas of attachment to the formed substrate and to the fixed outer plate are formed.
EFFECT: improving the accuracy of measuring linear accelerations.
1 cl, 4 dwg
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