SENSITIVE ELEMENT OF MICROMECHANICAL SENSOR Russian patent published in 2025 - IPC G01P15/125 

FIELD: measuring.

SUBSTANCE: invention relates to measurement of linear acceleration. Essence of the invention is that the micromechanical sensor elastic elements are in pairs symmetrical and located at the maximum distance from the sensitivity axis at the edges of the inertial mass; there is stopper in area of inertial mass, and the gap between the stopper and the inertial mass is less than the distance between the interdigital electrodes combs of the capacitive signal pickup system; wherein two groups of interdigital electrodes combs of the capacitive signal pickup system are formed, made with an offset relative to each other, wherein the displacement of the combs of the first group is made in one direction, and the displacement of the strips of the second group is made in the other direction – at the same distance.

EFFECT: sensitive element of a micromechanical sensor is disclosed.

1 cl, 3 dwg, 1 tbl