SOLID-STATE LINEAR ACCELERATION SENSOR Russian patent published in 2019 - IPC G01P15/02 

FIELD: measuring equipment.

SUBSTANCE: invention relates to measurement equipment and can be used in micromechanical sensors of linear accelerations. Proposed device comprises base, inertial mass and resilient elements. Two groups of separate electrically fixed capacitive comb-like converters are formed. Drums of movable capacitive comb-like converters and fixed capacitive comb-like converters are formed with offset relative to each other. Said resilient elements are jointed together with inertia mass while their opposite sides are jointed with attachment points to the base. Attachment points to the base are located symmetrically in the symmetry centre of the inertial mass along its longitudinal axis and symmetrically relative to its transverse axis.

EFFECT: technical result is higher accuracy of measuring linear accelerations.

1 cl, 2 dwg