FIELD: engines and pumps.
SUBSTANCE: device comprises a backing pump, the measuring arm with an insert with counterbody installed in the flange of the mandrel cardan crosses, tightly coupled with a flexible bellows with a fixed set of the vacuum chamber, the drive with the eccentric shaft connected thrust lever cardan cross, the lever with the load, the test sample mounted in a stationary vacuum chamber lid. The apparatus further comprises a turbo-molecular pump is combined with a backing pump in the pumping post which is connected via a bellows with a stationary vacuum chamber, the frequency converter, which is connected to the actuator, which is used as a motor-reducer having a worm gear to a three-phase induction motor. The drive, cardan cross with a movable flange and a flexible bellows measuring arm with an insert with counterbody mounted on a movable plate to repeatedly move with the help of a micrometer screw within the allowable deformation of the flexible bellows relative to the fixed bracket and the test specimen.
EFFECT: provision of compactness and reliability of the plant operation, providing a high vacuum, increasing its purity, creating the possibility of making fuller use of the sample surface.
4 dwg
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Authors
Dates
2017-05-18—Published
2016-01-18—Filed