FIELD: nanotechnology.
SUBSTANCE: invention relates to nanotechnology equipment and designed for closed cycle of production and measurement of new products of nanoelectronics. The nanotechnological complex comprises a robot-distributor with the ability of axial rotation, coupled with the chamber of loading samples and the module of local influence, as well as the measuring module comprising a scanning probe microscope, an analytical chamber, a monochromator and an x-ray source. The measuring module and the analytical chamber are coupled with the robot-dispenser, the monochromator is coupled with the analytical chamber, and the x-ray source - with the monochromator. The module of local influence comprises a module of focused ion beams and the first scanning electron microscope.
EFFECT: enhanced functional capabilities of the nanotechnological complex.
6 cl, 6 dwg
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