METHOD FOR PRODUCING NON-EVAPORABLE GETTER Russian patent published in 2017 - IPC B01J20/282 B22F3/11 B01J20/20 H01J7/18 F04B37/04 H01L23/26 

FIELD: chemistry.

SUBSTANCE: material layers of the first titanium-vanadium powder are formed, having an arithmetic average grain size less than 70 microns, and of the second powder - the first powder mixture of titanium-vanadium and of intercalated carbon. Titanium-vanadium powder, the mixture powder of titanium-vanadium and intercalated carbon and titanium-vanadium powder are poured successively into the mould. Pressing of the preform at the pressure of 100-1000 kg/cm², and sintering of the preform in the vacuum furnace at the temperature of 900-990°C are then carried out for (1.8-3.6)×10³ s, it is cooled to the room temperature, the resulting preform is removed from the vacuum furnace. The front and the back exterior surfaces of the preform are irradiated with laser light, for example, by means of laser CO₂, in the inert atmosphere of helium or argon to obtain a portion of the outer surface with an open porosity and a floatable portion of the outer surface.

EFFECT: improving the quality of the non-evaporable getter by reducing its friability, increasing the sorption of the properties and mechanical strength.

3 cl, 1 tbl, 6 ex