FIELD: vacuum engineering. SUBSTANCE: pump has many porous blades obtained by sintering and made of nonevaporating getter material, having first flat surface, second flat surface parallel to first one and spaced 0.5-5.0 mm from the former through thickness; blades are closed in casing and spaced apart by empty intermediate clearance; adjacent surfaces of juxtaposition blades are spaced 0.5-10 mm apart. EFFECT: Improved design. 9 cl, 10 dwg
Authors
Dates
1997-06-20—Published
1993-04-23—Filed