SINTERED NON-EVAPORATING GETTER Russian patent published in 2014 - IPC B01J20/282 B01J20/20 B01J20/02 B22F3/11 H01J7/18 F04B37/04 

Abstract RU 2513563 C2

FIELD: chemistry.

SUBSTANCE: invention relates to getter materials and particularly to sintered non-evaporating getters, and can be used in vacuum engineering and microelectronics, particularly in discharge devices. The sintered non-evaporating getter comprises three layers, wherein the first and third layers are made of titanium-vanadium alloy powder in ratio of 70:30 wt %, the second layer is made of a mixture of said alloy powder and intercalated carbon in ratio of (80:20)-(99:1) wt %, thickness of the first and third layers is 20-200 times the average particle size of the alloy powder, thickness of the second layer is 1-6 times the thickness of the first or third layer, the active area of the layers is equivalent to at least 50 times the geometrical area of the getter, wherein the porosity of the sintered getter is 30-60%.

EFFECT: broader functional capabilities, improved sorption properties and mechanical strength.

6 ex, 1 tbl, 1 dwg

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RU 2 513 563 C2

Authors

Zubkov Nikolaj Petrovich

Zubkova Galina Aleksandrovna

Pleshanov Sergej Anatol'Evich

Dates

2014-04-20Published

2012-08-17Filed