PIEZORESONANCE SENSITIVE ELEMENT OF ABSOLUTE PRESSURE Russian patent published in 2017 - IPC G01L9/08 

FIELD: measuring equipment.

SUBSTANCE: piezoresonance sensor (PSE) of the pressure comprises strain-transmitting body with a length exceeding the maximum size of its cross section, and sealed gas-filled or vacuumed cavity in which to the surface of the nodal points strain-sensing piezo resonator (SSPR) is rigidly fixed with thin film electrodes connected with metallized pads disposed on the outer surface of the housing within the projection of its cross-section, wherein the PSE body with a cavity and SSPR is formed in the form of a packet of two or more quartz crystal, rigidly joined along the periphery of the large faces, and the hermetic cavity is formed by depressions in the central part of the joined large faces of the two outer plates, and when forming the bag with the 3rd inner plate, also through holes in the center of its large faces are equal to the joined faces of the outer plates, and its length is also oriented along the length of the package. Moreover, one of the outer plates of the bag is longer than the other plates and protrudes along the length beyond their limits with one or both sides at least a quarter of the width of the bag, and the contact areas are made on the projecting parts of this plate. In the embodiments of the claimed device, along with the main effect of increasing the thermomechanical decoupling, additional results are achieved: the reduction in labour intensity due to the use of group technology MEMS, the possibility of creating high-precision pressure sensors operating at temperatures above 200°C due to the use of single crystals of Langatate or Langasite, etc.

EFFECT: increasing the short-term and long-term stability, with the possibility of maintaining small transverse dimensions of the casing, pressure sensors, in which the proposed piezoresonance sensor element will be installed.

11 cl, 7 dwg